Furnace加热炉

Max. Tem

1200℃

Heating zone length电压

440mm/220mm

Constant zone length

200mm-100mm

Temperature Controller

控温方式

lPID automatic control andauto-tune function.

模糊PID控制和自整定调节

l30 programmable segments for precise thermal processing.

智能化30段可编程控制

lBuilt-in protection for the over-heated and broken thermocouple.

超温和断偶报警功能

lOperation interface is 7 "industrial control computer

操作界面为7”工控电脑

Heating Elements

加热元件

·Resistance wire, Fe-Cr-Al Alloy doped by Mo

电阻丝（掺钼铁铬铝合金）

Temperature Accuracy

控温精度

+/- 1°C

Processing tube

炉管

Φ50/60/80-100(可选）*1650mm(optional)

升温速率Heating rate

10℃/min

PE sourcePE源

Signal frequency信号频率

13、56 MHz±0.005%

Power output range功率输出

0-500W

范围可根据客户工艺定制Can be customized according to customer process

RF output interface射频输出接口

50Ω, N-type, female

Power stability功率稳定性

≤5W

Gas supply system气路系统

High precision mass Flowmeter（Range optional）

高精度质量流量计（量程可选）

Accuracy准确度

±1、5%

Response accuracy响应精度

·±0.2%

Response time

响应时间

Gas characteristics：1～4sec

气特性

Electrical characteristics:10sec

电特性

Working pressure difference range工作压差范围

0.1～0.5MPa

Max. pressure额定压力

·3MPa

Connection连接头类型

Φ6mmDouble clasp stainless steel joint

Φ6mm双卡套不锈钢接头

Vacuum unit真空系统

KF25 series bellows and manual stopper valves

采用KF25系列波纹管和手动挡板阀

Vacuum up to10-1Pa

真空度可达10-1Pa

The value can be displayed intuitively by the digital display vacuum tester

数显真空测试仪可直观的显示数值