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电阻真空计 INFICON Capacitance Diaphragm Gauge
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This is a Pirani Capacitance Diaphragm Gauge (EQ-PGC-554) combines the patented ceramic capacitance diaphragm sensor technology with the advantages of a Pirani gauge in a single product. In the measurement range between 10 mbar and atmosphere, the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement.
With the need to factor gas type dependency into the pressure reading output being eliminated, risks of explosions in tube vessels or other chambers due to incorrect display of pressure AND/OR negligence of adjustment for gas types ARE GREATLY REDUCED.
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Features |
Designed and made by Switzerland-based INFICON Gas-type independent above 10 mbar - allows safe venting with any gas mixture High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Versatile mounting orientation provides engineering freedom in tool design fully ceramic coated sensor unit for highly corrosive applications Easy to exchange plug & play sensor element with onboard calibration data guarantees high reproducibility and low cost of ownership |
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Power Connection |
9 pins D-sub connector. |
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Power Adapter |
One 15 VDC power adapter is included and ready to use. Input voltage for the adapter is 110~240 V. |
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Measurement Range |
3、8E-5to 1125 Torr. |
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Accuracy |
5×10-4 … 1×10-3 mbar (N2) ±50% ofreading 1×10-3 … 100 mbar (N2)±15%of reading 100 … 950 mbar±5%of reading 950 … 1050 mbar±2、5%of reading |
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Display |
Digital display (20x14 mm) with measurement unit Torr |
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Gauge Fitting |
Small Foot-Print with KF16 port |
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Dimensions |
46 mm×28 mm×126 mm (L x W x H) |
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Shipping Weight |
5lbs |
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Warranty |
One year limited manufacturer warranty, please contact vc.service.usa@inficon.comfor information. In the case of severe contamination or malfunction, the sensor can be replaced, please read the instruction for details. Replacement sensor is offered at $574/each) |
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Calibration |
The pressure gauge is manufactured calibrated base onPTB / METAS (German / Swiss NIST) standards. Calibration data is available upon request. |
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Application Notes |
General vacuum measurement and control in theMedium Vacuum Range (Range 1、0E-4 Torr to ATM). Pirani gauges used in a clean environment can effectively operate above5、0E-5 Torr range. If your tool requires effective reading in the 1、0E-5 Torr or lower, please selectPirani/Cold Cathode gaugewithmeasurement range from 3、75E-9 to 760 Torr Optional: M14 to KF16 adapter is needed for the use with MTI vacuum flanges, please click pic below to order replacement part By connecting to a set ofSolenoid Valves, this gauge can also be used with apressure control systemto keep the pressure constant in a vacuum system. |
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