硅片

Diameter: 100±0.3mm
Type: P/B
Orientation: lt;100gt;
Thickness:525±25 μm
Resistivity: 5~10 ohm-cm
Film: 1000A+-5% Thermal Oxide

Diameter: 100±0.3mm
Type: P/B
Orientation: lt;100gt;
Thickness:375±25 μm
Resistivity: lt;0.005 ohm-cm
Film: 500A+-5% Thermal Oxide