卷对卷薄膜石墨烯生长设备R-T-R、Roll-to-roll film graphene growth equipmen
主要特点
基于广大科研界对实现大面积单层石墨烯薄膜在工业铜箔基底上卷对卷宏量制备的需求,我公司利用一种新型等离子增强卷对卷连续快速生长石墨烯薄膜的方法，设计并研制了可达到中试水平的石墨烯卷对卷化学气相沉积系统，通过对石墨烯成核与生长的调控实现高品质石墨烯薄膜生长;卷对卷热压印-电化学快速鼓泡转移方法转移，避免了铜箔刻蚀的常规转移工艺，实现了石墨烯从铜箔生长基底直接向工业用 PET 柔性透明塑料基底的连续化无损转移。
Based on the demand for large area single-layer graphene film on the industrial copper foil substrate, we used the method that a new plasma enhanced roll-to-roll makes graphene film continuous and rapid growth, and designed, developed the middle-level graphene roll-to-roll CVD.
By controlling the nucleation and growth of graphene, the growth of high quality graphite thin film is realized, and by roll-to-roll hot pressing, rapid electrochemical bubbling transferring, the copper foil etching is avoided, which realizes the continuous nondestructive transfer of graphene directly from the copper foil growth substrate to the industrial PET flexible transparent plastic substrate。
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Voltage 输入电源 |
·Furnace inputAC 208-240V，50/60 Hz 输入电压110V/220V 50/60 HZ |
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Power 功率 |
6KW |
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Working Temperature 工作温度 |
·Max. Temperature: 1200℃ (< 1 hr) 额定温度：1200℃(< 1 hr) ·Continuous working temperature:1100℃ 持续工作温度：1100℃ |
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Heating Zone 加热区 |
·Heating Zone Length: 7、87"(200+200+200mm) 加热区长度：7、87”(200+200+200mm) ·Constant Temperature Zone:15、74"(400mm. +/-1ºC ) 恒温区长度：15、74"(400mm. +/-1ºC ) |
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Heating Elements 加热元件 |
·Fe-Cr-Al Alloy doped by Mo 电阻丝（掺钼铁铬铝合金） |
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Processing Tube 炉管 |
·High purityquartz tube:100mm ODx1700mm Length 石英管：100（外径）*1700（长）mm |
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Copper foil width 铜箔基底宽度 |
≤80mm |
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Copper foil running rate 铜箔前行速度 |
8cm/min---50cm/min可调 Adjustable |
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RF Signal frequency 射频信号频率 |
13、56MHz±0.005%W |
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Power output 功率输出范围 |
0-500W |
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VacuumDgree 真空度 |
10-1Pa |
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Dimensions 尺寸 |
280*60*130cm |
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Warranty 质保 |
One year limited warranty with lifetime support (Consumable parts such as processing tubes, and O-rings are notcoveredby the warranty,please order replacements at related products below.) 一年质保终身支持（消耗品如炉管，O型圈不在质保范围内） |
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Application Note 应用 |
·Equipped with high precision mass flowmeter in the gas system,can control the gas flow 气路系统内部装有高精度质量流量计可准确的控制气体流量 ·Gas can mix sufficient in required proportion in the static mixing chamber, 设静态混气室，有助于气体充分混合，按要求配比 ·Can match R-T-R laminating & stripping equipment as below: 配套石墨烯卷对卷覆膜、剥离设备如下图
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